Description
Type | Fully automatic type for mass production |
Target wafer size | 4,5,6,8 inches |
Use | Bump, Rewiring, W-CSP, MEMS |
Marking | Compatible with SEMI-S2, SEMI-S8 and CE marking |
Feature | ・ Equipped with spin rinser dryer (dry in dry out) ・ Ring cathode that achieves high in-plane uniformity * ・ Closed cup with high mist protection effect ・ Equipped with automatic cathode cleaner ・ Operation conditions can be registered and managed for each lot. ・ The number of plating cups can be increased in units of 2 cups. |